| Original language | American English |
|---|---|
| Journal | Physics Faculty Publications |
| State | Published - Nov 27 2017 |
Keywords
- Diffraction gratings
- Lithography
Disciplines
- Optics
- Physics
Raphael A Guerrero, Caironesa T Pada
Research output: Contribution to journal › Article › peer-review
| Original language | American English |
|---|---|
| Journal | Physics Faculty Publications |
| State | Published - Nov 27 2017 |