Detection of Si nanoclusters by x-ray scattering during silicon film deposition by mesoplasma chemical vapor deposition

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@article{9625e39bf9584f6d81bc3d30ddf1cd82,

title = "Detection of Si nanoclusters by x-ray scattering during silicon film deposition by mesoplasma chemical vapor deposition",

author = "Diaz, \{Jose Mario A.\} and Makoto Kambara and Toyonobu Yoshida",

year = "2008",

doi = "10.1063/1.2956692",

language = "English",

volume = "104",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Detection of Si nanoclusters by x-ray scattering during silicon film deposition by mesoplasma chemical vapor deposition

AU - Diaz, Jose Mario A.

AU - Kambara, Makoto

AU - Yoshida, Toyonobu

PY - 2008

Y1 - 2008

UR - https://www.scopus.com/pages/publications/47849095361

UR - https://www.scopus.com/pages/publications/47849095361#tab=citedBy

U2 - 10.1063/1.2956692

DO - 10.1063/1.2956692

M3 - Article

AN - SCOPUS:47849095361

SN - 0021-8979

VL - 104

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

M1 - 013536

ER -