Detection of Si nanoclusters by x-ray scattering during silicon film deposition by mesoplasma chemical vapor deposition

Jose Mario A. Diaz, Makoto Kambara, Toyonobu Yoshida

Research output: Contribution to journal › Article › peer-review

ASJC Scopus Subject Areas

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title = "Detection of Si nanoclusters by x-ray scattering during silicon film deposition by mesoplasma chemical vapor deposition",

author = "Diaz, {Jose Mario A.} and Makoto Kambara and Toyonobu Yoshida",

year = "2008",

doi = "10.1063/1.2956692",

language = "English",

volume = "104",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "1",

}

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AU - Diaz, Jose Mario A.

AU - Kambara, Makoto

AU - Yoshida, Toyonobu

PY - 2008

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JO - Journal of Applied Physics

JF - Journal of Applied Physics

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